Electron kinetics of weakly ionized collision-dominated RF plasmas in CO
Authors:
- 1 December 1986
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 6 (4) , 437-456
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Main Features of the Electron Kinetics in Collision Dominated Steady‐State rf PlasmasAnnalen der Physik, 1985
- Ion dynamics of rf plasmas and plasma sheaths: A time-resolved spectroscopic studyJournal of Applied Physics, 1984
- Kinetic processes in non-equilibrium carbon monoxide discharges. II. Self-consistent electron energy distribution functionsChemical Physics, 1984
- Electron Kinetics of Weakly Ionized HF Plasmas I. Direct Treatment and Fourier ExpansionContributions to Plasma Physics, 1984
- Conduction and Dispersion of Ionized Gases at High FrequenciesPhysical Review B, 1946