Effect of additional sample bias in Meshed Plasma Immersion Ion Deposition (MPIID) on microstructural, surface and mechanical properties of Si-DLC films
Authors:
- Mingzhong WuMWMingzhong Wu
- Xiubo TianXTXiubo Tian
- Muqin LiMLMuqin Li
- Chunzhi GongCGChunzhi Gong
- Ronghua WeiRWRonghua Wei
- 1 July 2016
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 376, 26-33
Abstract
No abstract availableFunding Information
- National Natural Science Foundation of China (51175118, U1330110)
- State Key Laboratory of Advanced Welding & Joining, Harbin Institute of Technology (AWPT-Z02)
This publication has 30 references indexed in Scilit:
- From DLC to Si-DLC based layer systems with optimized properties for tribological applicationsSurface and Coatings Technology, 2013
- Contact fatigue performance of helical gears with surface coatingsWear, 2012
- Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVDSurface and Coatings Technology, 2011
- Effects of bias voltage on structure and properties of TiAl‐doped a‐C:H films prepared by magnetron sputteringSurface and Interface Analysis, 2011
- Nanomechanical and nanotribological properties of carbon-based thin films: A reviewInternational Journal of Refractory Metals and Hard Materials, 2010
- The mechanical and biocompatibility properties of DLC-Si films prepared by pulsed DC plasma activated chemical vapor depositionDiamond and Related Materials, 2007
- Micro‐Raman Studies on DLC coatingsAdvanced Engineering Materials, 2005
- Raman spectroscopy of hydrogenated amorphous carbonsPhysical Review B, 2005
- Diamond-like amorphous carbonMaterials Science and Engineering: R: Reports, 2002
- Interpretation of Raman spectra of disordered and amorphous carbonPhysical Review B, 2000