Abstract
A new model for the description of incoherent peaks observed in energy‐dispersive x‐ray fluorescence spectra is proposed. The model was derived after a systematic study of peak shapes based on Monte Carlo simulations. The model consists of a Gaussian modified by two exponential tail functions. The model is implemented in a non‐linear least‐squares fitting procedure and tested on spectra measured with a 109 Cd excitation XRF setup using an HPGe detector. Copyright © 2003 John Wiley & Sons, Ltd.

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