EPITAXIAL GROWTH OF ZIRCONIA AND YTTRIA STABILIZED ZIRCONIA FILMS ON SAPPHIRE SUBSTRATES BY REACTIVE SPUTTERING
Authors:
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
- Vol. 56
Abstract
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This publication has 1 reference indexed in Scilit:
- Heteroepitaxial Si films on yttria-stabilized, cubic zirconia substratesApplied Physics Letters, 1983