Design and optimization of a MEMS electret-based capacitive energy scavenger
Authors:
- T. TambossoTTT. Tambosso
- 6 June 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 14 (3) , 429-435
Abstract
In this paper, a method for the design and optimization of an electret-based vibration-to-electric microconverter is presented, using a nonlinear dynamical model of the device. The dynamics of the converter is analyzed in detail, showing the importance of properly accounting for the nonlinearity in the optimization process. A procedure to determine a set of optimization parameters is finally presented.Keywords
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