Big Data Analysis Methodology for Smart Manufacturing Systems

This publication has 16 references indexed in Scilit:

• A big data analytics platform for smart factories in small and medium-sized manufacturing enterprises: An empirical case study of a die casting factory
  International Journal of Precision Engineering and Manufacturing, 2017
• Technology and Issue on Embodiment of Smart Factory in Small-Medium Manufacturing Business
  The Journal of Korean Institute of Communications and Information Sciences, 2015
• Fault Detection Using the k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes
  IEEE Transactions on Semiconductor Manufacturing, 2007
• Data mining for yield enhancement in semiconductor manufacturing and an empirical study
  Expert Systems with Applications, 2007
• A PCA-Based PCM Data Analyzing Method for Diagnosing Process Failures
  IEEE Transactions on Semiconductor Manufacturing, 2006
• Multiblock Principal Component Analysis Based on a Combined Index for Semiconductor Fault Detection and Diagnosis
  IEEE Transactions on Semiconductor Manufacturing, 2006
• Fault Detection for a Via Etch Process Using Adaptive Multivariate Methods
  IEEE Transactions on Semiconductor Manufacturing, 2005
• Fault detection in reactive ion etching systems using one-class support vector machines
  2005
• A neural-network approach to recognize defect spatial pattern in semiconductor fabrication
  IEEE Transactions on Semiconductor Manufacturing, 2000
• Statistical process control in semiconductor manufacturing
  Proceedings of the IEEE, 1992