A study of doped polycrystalline diamond plates by non-destructive methods

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Abstract
Diamond offers great promise as a solution to some of the limitations of current state of the art semiconductor technologies. Yet, significant challenges associated with the doping process remain a primary impediment to the development of diamond-based electronic devices. At present, it is unclear which simple measurement methods are needed to evaluate the diamond doping process. We propose non-destructive inspection methods for evaluating the polycrystalline chemical vapor deposition (CVD) diamond doping process, by analyzing the wettability, optical absorption, photoluminescence emission spectroscopy and atmospheric scanning electron microscope (Air-SEM) tests. Our results show that the properties of the measured samples are distinctly changed due to the presence of the doping elements, thereby confirming the effectiveness of these non-destructive methods for the diamond production industry.

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