Excimer laser ablation removal of thin chromium films from glass substrates
Authors:
- S.K. LeeSLS.K. Lee
- K.K. YoonKYK.K. Yoon
- K.H. WhangKWK.H. Whang
- S.J. NaSNS.J. Na
- 1 March 1999
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 113 (1-2) , 63-74
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Excimer laser ablation of thin gold films on a quartz crystal microbalance at various argon background pressuresApplied Physics A, 1997
- UV-laser ablation of ductile and brittle metal filmsApplied Physics A, 1997
- Dynamics of excimer laser ablation of thin tungsten films monitored by ultrafast photographyApplied Physics A, 1995
- Laser Ablation1994
- Ablation of Organic Materials with Excimer Lasers1987
- Semiconductor heterojunction topics: Introduction and overviewSolid-State Electronics, 1986
- Metal film removal and patterning using a XeCl laserApplied Physics Letters, 1983
- Two-phase mechanism of laser-induced removal of thin absorbing films. I. TheoryJournal of Physics D: Applied Physics, 1980
- Thin-film machining by laser-induced explosionApplied Physics Letters, 1977
- Thermal analysis of thin-film micromachining with lasersJournal of Applied Physics, 1973