Abstract
Nanocrystalline metallic Pd films have been produced by thermolysis of Pd hexadecanethiolate deposited on a Si surface. The particle size was in the range of 50–60 nm based on electron and atomic force microscopy. The Pd surface produced was found to be surface‐enhanced Raman scattering (SERS) active with an enhancement factor of ≈105. The electron‐resist behavior of Pd thiolate is exploited in conceptualizing a prototype chip with patterned Pd regions that are SERS active, called “SERS bits”, which host different biomolecules.

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