Optical measurement of the elastic moduli and thermal diffusivity of a C–N film
Authors:
- 1 January 1995
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 10 (1) , 41-48
Abstract
The elastic properties of carbon nitride (CNx) film adhered to a silicon substrate were characterized through impulsive stimulated thermal scattering (ISTS). The lowest-order pseudo-Rayleigh acoustic mode of the film was excited and monitored optically. From the measured acoustic phase velocities, the elastic moduli of the film were determined. The ISTS technique also permits measurements of the CNx thermal diffusivity. The noninvasive optical measurements described can provide a useful guide to refinements in thin film fabrication procedures and for optimization of mechanical and thermal transport properties.Keywords
This publication has 12 references indexed in Scilit:
- Study of Lamb acoustic waveguide modes in unsupported polyimide thin films using real-time impulsive stimulated thermal scatteringJournal of Applied Physics, 1994
- Experimental Realization of the Covalent Solid Carbon NitrideScience, 1993
- Real-time optical characterization of surface acoustic modes of polyimide thin-film coatingsJournal of Applied Physics, 1992
- Ultrasonic wave propagation and barrier-limited heat flow in thin films ofPhysical Review B, 1991
- Chemical Preparation and Shock Wave Compression of Carbon Nitride PrecursorsJournal of the American Ceramic Society, 1990
- Pyrolytic Deposition of Carbon Films Containing Nitrogen and/or BoronJournal of the American Ceramic Society, 1990
- Prediction of New Low Compressibility SolidsScience, 1989
- The temperature-dependent distribution of relaxation times in glycerol: Time-domain light scattering study of acoustic and Mountain-mode behavior in the 20 MHz–3 GHz frequency rangeThe Journal of Chemical Physics, 1988
- Structural and optical properties of amorphous carbon nitrideSolid State Communications, 1988
- Calculation of bulk moduli of diamond and zinc-blende solidsPhysical Review B, 1985