Calibration-free low-drift MEMS piezoelectric accelerometer for high-temperature vibration monitoring

Authors:
  • ALAnna Li
    Anna Li
  • JHJiaqi Huang
    Jiaqi Huang
  • JZJiachang Zhang
    Jiachang Zhang
  • HHHao Huang
    Hao Huang
  • YSYongquan Su
    Yongquan Su
  • LWLihao Wang
    Lihao Wang
  • YLYichen Liu
    Yichen Liu
  • DCDalong Chen
    Dalong Chen
  • FTFeng Tian
    Feng Tian
  • ZWZhenyu Wu
    Zhenyu Wu

Abstract
No abstract available
Funding Information
  • Shanghai Institute of Microsystem and Information Technology (2024YFB3213300, 224PJA153, GJ04040303)
  • National Key Research and Development Program of China
  • Chinese Academy of Sciences

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