Grazing incidence and grazing exit X-ray fluorescence: principles, techniques, and applications for thin film and nanostructure analysis

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Abstract
The grazing incidence – and grazing exit X-ray fluorescence techniques and their theoretical background are described with examples and a review of recent developments and applications is provided in this review.
Funding Information
  • European Partnership on Metrology (21GRD01 (OpMetBat))
  • Helmholtz-Zentrum Berlin für Materialien und Energie (Hi-Acts BATIXS)
  • Chips Joint Undertaking (14ACMOS (grant agreement number 101096772))
  • Helmholtz Association
  • Max-Planck-Gesellschaft

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