Confocal micro-Raman scattering and Rutherford backscattering characterization of lattice damage in aluminum implanted 6H–SiC
Authors:
- F.J CamposFCF.J Campos
- N MestresN Mestres
- F AlsinaFAF Alsina
- J PascualJPJ Pascual
- E MorvanEME Morvan
- P GodignonPGP Godignon
- J MillánJMJ Millán
- 1 March 1999
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 8 (2-5) , 357-360
Abstract
No abstract availableKeywords
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