Submicron technology for III-nitride semiconductors
- 1 September 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Vol. 20 (5) , 2071-2074
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- High-responsivity submicron metal-semiconductor-metal ultraviolet detectorsApplied Physics Letters, 2002
- Nanotechnology for SAW devices on AlN epilayersMaterials Science and Engineering: B, 2002
- Efficiency of GaN/InGaN light-emitting diodes with interdigitated mesa geometryApplied Physics Letters, 2001
- Application and Performance of GaN Based UV DetectorsPhysica Status Solidi (a), 2001
- GaN microwave electronicsIEEE Transactions on Microwave Theory and Techniques, 1998
- The Blue Laser Diode1997
- Current transport in metal-semiconductor-metal (MSM) structuresSolid-State Electronics, 1971