Scalable and lightweight vision transformers for mixed-defect classification in semiconductor wafer maps
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Open Access
- 25 August 2026
- journal article
- research article
- Published by Springer Nature in Scientific Reports
Abstract
No abstract availableKeywords
Funding Information
- ITR (IITP-2025-RS-2020-II201795)
- Hyunsong Educational & Cultural Foundation
- Korea Foundation of Nuclear Safet (2105030)
- Basic Science Research Program (NRF- 2022R1I1A3069233)