A Self-Assemble W -Band Multilayer Silicon-Based Waveguide With Dumbbell-Shaped Holey EBG Structures and Its Antenna Applications

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Abstract
This article develops a novel holey electromagnetic bandgap (EBG) structure comprising dumbbell-shaped (DS) holes. They enable the self-assembly of multilayer metallic plates constituting the waveguide and cavity-based components. Compared to conventional circular holey EBG structures, the proposed DS irregular holes feature a compact size, a wide stopband, and insensitivity to misalignment. Moreover, the methodology of connecting multiple holes based on the DS holey EBG structure significantly reduces the number of holes, thereby simplifying their distribution in different layers and enhancing the integration of complex devices. For demonstration, straight rectangular waveguides integrated with DS holey EBG structures are designed in the $W$ -band first. Furthermore, two $W$ -band over-mode cavity-backed $8\times 8$ slot arrays, integrated with and without DS holey EBG structures, are also designed for comparison. The constitutive multilayer metallic plates are fabricated by applying the deep reactive ion etching (DRIE) and physical vapor deposition (PVD) processes. Abroadband measurement bandwidth is obtained. According to measurement, the transmission loss per unit length of the rectangular waveguide is evaluated as low as 0.012dB/mm at 100GHz. The $8\times 8$ slot arrays achieve wideband operation and low sidelobe levels (SLLs). The measured −10-dB impedance-matching bandwidth is 90–109.5GHz (19.5%), while the 3-dB down boresight gain bandwidths are 90–108GHz (18%) with in-band SLLs less than −12.9dB. An improvement of about 2dB has been observed in the antenna gain by comparing the antennas with and without DS holey EBG structures.
Funding Information
  • National Natural Science Foundation of China (62571463)
  • Science and Technology Program of Hunan Province (2024H6003)
  • State Key Laboratory of Food Science and Resources (KF2024003)
  • State Key Laboratory of Food Science and Resources (KF2024008)

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