Nano-structured anti-reflective surfaces replicated by hot embossing
Authors:
- 31 July 2002
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 61-62, 435-440
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Quantitative analysis of the molding of nanostructuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2000
- Line width control using a defocused low voltage electron beamMicroelectronic Engineering, 1999