Ion assisted deposition of α-Al2O3 coatings by anodic evaporation in the arc discharge
Authors:
- N.V. GavrilovNGN.V. Gavrilov
- A.S. KamenetskikhAKA.S. Kamenetskikh
- P.V. TretnikovPTP.V. Tretnikov
- A.V. ChukinACA.V. Chukin
- 1 March 2018
- journal article
- research article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 337, 453-460
Abstract
No abstract availableKeywords
Funding Information
- Russian Academy of Sciences (18-2-2-7i)
- Russian Foundation for Basic Research (17-08-00942-a)
This publication has 30 references indexed in Scilit:
- High-performance coatings for cutting toolsCIRP Journal of Manufacturing Science and Technology, 2017
- Luminescent and dosimetric properties of thin nanostructured layers of aluminum oxide obtained using evaporation of a target by a pulsed electron beamTechnical Physics Letters, 2013
- Preparation, characterization, and corrosion behavior of protective coatings on stainless steel samples deposited by plasma detonation techniquesSurface and Coatings Technology, 2004
- Low temperature deposition of α-Al2O3 thin films by sputtering using a Cr2O3 templateJournal of Vacuum Science & Technology A, 2002
- Chemical vapor deposition of smooth α-Al2O3 films on nickel base superalloys as diffusion barriersSurface and Coatings Technology, 1999
- Deposition of hard crystalline Al2O3 coatings by bipolar pulsed d.c. PACVDSurface and Coatings Technology, 1998
- Optical and electrical properties of aluminum oxide films deposited by spray pyrolysisApplied Physics Letters, 1998
- State of the art in hard coatings for carbide cutting toolsSurface and Coatings Technology, 1998
- Epitaxial Al2O3 films on Si by low-pressure chemical vapor depositionApplied Physics Letters, 1988
- Preparation of alumina coatings by chemical vapour depositionThin Solid Films, 1986