Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches
Authors:
- D. ForehandDFD. Forehand
- C.L. GoldsmithCGC.L. Goldsmith
- 1 January 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 753-756
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A comprehensive model to predict the charging and reliability of capacitive RF MEMS switchesJournal of Micromechanics and Microengineering, 2004
- Lifetime characterization of capacitive RF MEMS switches2002
- Discharging Current Transient Spectroscopy for Evaluating Traps in InsulatorsJapanese Journal of Applied Physics, 1995