Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications

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Abstract
In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation without pull-in. The vertical MEMS actuator was fabricated using the SiOG (Silicon on Glass) process and the total actuator size was 8.3 mm × 8.3 mm. The fabricated proof mass was freestanding due to eight serpentine springs with 30 μm width. The vertical movement of the MEMS actuator was successfully controlled electrostatically. The measured vertical movement was 5.6 µm for a voltage of 40 V, applied between the top silicon structure and the hollow square electrode. The results shown here confirm that the proposed MEMS actuator was able to control the vertical displacement using an applied voltage.
Funding Information
  • MSIT (Ministry of Science and ICT), Korea, under the “Nano·Material Technology Development Program” (2009-0082580, 2022R1H1A2091664, SPS G5640)
  • National Research Foundation of Korea (NRF) grant by the Korea government (MSIT) (2009-0082580, 2022R1H1A2091664, SPS G5640)
  • NATO/OTAN (2009-0082580, 2022R1H1A2091664, SPS G5640)

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