Nitridation of Si()

Authors:

X.-S. Wang
X.-S. Wang

Publisher website

1 November 2001

journal article
Published by Elsevier in Surface Science

Vol. 494 (2) , 83-94
DOI:10.1016/s0039-6028(01)01409-1

Abstract

No abstract available

Keywords

This publication has 44 references indexed in Scilit:

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