In-situ photonic circuit field characterization in electronics-photonics CMOS platform via backside flip-chip near-field scanning optical microscopy
- 1 January 2022
- conference paper
- Published by Optica Publishing Group
- p. SM3N.1
Abstract
We demonstrate device field c haracterization u sing N SOM c ollection a nd in-teraction measurement modes via the backside buried-oxide of large scale photonic circuits fabricated in monolithic electronics-photonics CMOS platforms (here a microdisk resonator) post-processed using flip-chip substrate-removal.Keywords
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