Measurement of toxic volatile organic compounds in indoor air of semiconductor foundries using multisorbent adsorption/thermal desorption coupled with gas chromatography–mass spectrometry

Authors:
  • MLMing-Nan Lin
    Ming-Nan Lin
  • CFChien-Tai Feng
    Chien-Tai Feng
  • KYKuang-Ling Yang
    Kuang-Ling Yang
  • YLYu-Shiu Lo
    Yu-Shiu Lo
  • JLJiunn-Guang Lo
    Jiunn-Guang Lo

Abstract
No abstract available

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