Fabrication and performance study of subwavelength metallic grating via nanoimprint lithography
Authors:
- Yan GuYan Gu
- Yingao XueYXYingao Xue
- Jieqiong LinJLJieqiong Lin
- Yuanshuo LiuYLYuanshuo Liu
- Yamei LiuYLYamei Liu
- Kepeng SuiKSKepeng Sui
- Silin LiuSLSilin Liu
- Hongxin GuoHGHongxin Guo
- Weidong ZhouWZWeidong Zhou
- Lingling HanLHLingling Han
- Bin WangBWBin Wang
- 6 February 2026
- journal article
- Published by Elsevier in Optics & Laser Technology
- Vol. 198
Abstract
No abstract availableFunding Information
- National Natural Science Foundation of China (52475426)
This publication has 53 references indexed in Scilit:
- Liquid-free electrochemical approach for direct patterning of ITO films with polymer electrolyte stamps for flexible transparent electrodesApplied Surface Science, 2025
- Preparation of transparent conductive microstructures on curved substrates via laser-assisted transfer technologyApplied Surface Science, 2025
- Optimized dose modulation for controlled greyscale electron beam lithography for negative tone resistApplied Surface Science, 2025
- Asymmetric Transmission and Diffraction Engineering in Ultrathin media via Coupled MetasurfacesAdvanced Optical Materials, 2025
- Metasurface‐Embedded Contact Lenses for Holographic Light ProjectionAdvanced Science, 2024
- Top-down fabrication of Ge nanowire arrays by nanoimprint lithography and hole gas accumulation in Ge/Si core–shell nanowiresApplied Surface Science, 2023
- Biomimetic high water adhesion superhydrophobic surface via UV nanoimprint lithographyApplied Surface Science, 2023
- Nanoscale patterning of metallic surfaces with laser patterned tools using a nanoimprinting approachApplied Surface Science, 2022
- Polymer nanoimprinting using an anodized aluminum mold for structural colorationApplied Surface Science, 2015
- Navier-Stokes equations and area of interfacesCommunications in Mathematical Physics, 1990