Technology for backside contacted pH-sensitive ISFETs embedded in a p-well structure
Authors:
- 31 January 1990
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 1 (1-6) , 335-340
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Packaging technologies for integrated electrochemical sensorsSensors and Actuators, 1989
- A combined pH—pressure cathether for gastroenterological applicationsSensors and Actuators, 1989
- A pH-isfet and an integrated ph-pressure sensor with back-side contactsSensors and Actuators, 1988
- An Integrated Sensor for Electrochemical MeasurementsIEEE Transactions on Biomedical Engineering, 1986