Revolutionizing Chemical Mechanical Polishing with Machine Learning: A Comprehensive Review of Challenges and Opportunities

Authors:

13 August 2025

journal article
review article
Published by Springer Nature in Archives of Computational Methods in Engineering

Vol. 33 (1) , 823-857
DOI:10.1007/s11831-025-10324-6

Abstract

No abstract available

Keywords

Funding Information

National Key R&D Program of China (No.2023YFB35 07100)
National Key R&D Program of China (No.2023YFB35 07100)
National Key R&D Program of China (No.2023YFB35 07100)
National Key R&D Program of China (No.2023YFB35 07100)
National Key R&D Program of China (No.2023YFB35 07100)
National Key R&D Program of China (No.2023YFB35 07100)
National Key R&D Program of China (No.2023YFB35 07100)
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
National Natural Science Foundation of China (No. 62074049)
National Natural Science Foundation of China (No. 62074049)
National Natural Science Foundation of China (No. 62074049)
National Natural Science Foundation of China (No. 62074049)
National Natural Science Foundation of China (No. 62074049)
National Natural Science Foundation of China (No. 62074049)
National Natural Science Foundation of China (No. 62074049)
Natural Science Foundation of Hebei Province (No. F2021202009)
Natural Science Foundation of Hebei Province (No. F2021202009)
Natural Science Foundation of Hebei Province (No. F2021202009)
Natural Science Foundation of Hebei Province (No. F2021202009)
Natural Science Foundation of Hebei Province (No. F2021202009)
Natural Science Foundation of Hebei Province (No. F2021202009)
Natural Science Foundation of Hebei Province (No. F2021202009)
Construction project of Hebei province professional degree high-quality teaching case base (No. KCJPZ2023007)
Construction project of Hebei province professional degree high-quality teaching case base (No. KCJPZ2023007)
Construction project of Hebei province professional degree high-quality teaching case base (No. KCJPZ2023007)
Construction project of Hebei province professional degree high-quality teaching case base (No. KCJPZ2023007)
Construction project of Hebei province professional degree high-quality teaching case base (No. KCJPZ2023007)
Construction project of Hebei province professional degree high-quality teaching case base (No. KCJPZ2023007)
Construction project of Hebei province professional degree high-quality teaching case base (No. KCJPZ2023007)

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