General stress reduction mechanisms for the deposition of cubic boron nitride thin films
Authors:
- S UlrichSUS Ulrich
- H EhrhardtHEH Ehrhardt
- J SchwanJSJ Schwan
- W DonnerWDW Donner
- H DoschHDH Dosch
- P WidmayerPWP Widmayer
- P ZiemannPZP Ziemann
- 1 September 1999
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 116-119, 269-273
Abstract
No abstract availableKeywords
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