Design and fabrication of low-deformation micro-bolometers for THz detectors
Authors:
- Ziji LiuZLZiji Liu
- Zhiqing LiangZLZhiqing Liang
- Wen TangWTWen Tang
- Xiangdong XuXXXiangdong Xu
Open Access
- 1 March 2020
- journal article
- research article
- Published by Elsevier in Infrared Physics & Technology
- Vol. 105
Abstract
No abstract availableKeywords
Funding Information
- Sichuan Provincial Science and Technology Support Program (2018TZDZX0008, 61377063)
- National Natural Science Foundation of China (2018TZDZX0008, 61377063)
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