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Publications
Polycrystalline Silicon for Integrated Circuits and Displays
Home
Publications
Polycrystalline Silicon for Integrated Circuits and Displays
Polycrystalline Silicon for Integrated Circuits and Displays
Author:
TK
Ted Kamins
Ted Kamins
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1 January 1998
book
Published by
Springer Nature
DOI:
10.1007/978-1-4615-5577-3
Abstract
No abstract available
Keywords
DRAM
SENSOR
WAFER
COMPUTER
CRYSTAL
DIELECTRICS
INTEGRATED CIRCUIT
INTERCONNECT
LIQUID
MICROELECTROMECHANICAL SYSTEM (MEMS)
MODELING
PHYSICS
THERMODYNAMICS
THIN FILM TRANSISTOR
TRANSISTOR
Cited
Cited by 158 articles
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