Evaporatively deposited Co-MgF/sub 2/ granular materials for thin-film inductors

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Abstract
Co-MgF2 granular thin films prepared by thermal evaporation are reported. The fabricated materials show promise as high-frequenc y, low-loss cores for microfabricated magnetic devices in microprocessor power delivery applications. Transmission electron microscopy (TEM) reveals Co grains of about 3.2 nm embedded in a MgF2 matrix 1 to 2 nm wide. Films were prepared with 20% to 89% volume cobalt at substrate temperatures between -21°C and 311°C. Good soft magnetic properties in a range of 40% to 55% volume cobalt with high dc resistivity of 500 μΩ-cm to 100 Ω-cm are measured for films deposited at room temperature. Low intrinsic coercivity, Hci of 0.76 Oe and susceptibility, χ of 26 in the easy axis direction with quality factor, Q over 100 and saturation flux density, Bs of 0.7 T are obtained. Index Terms—Co-MgF2, evaporation, evaporative deposition, granular magnetic film, inductors, thin films.

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