In situ mass spectrometry analysis of chemical vapour deposition of TiO 2 thin films to study gas phase mechanisms
- 21 November 2016
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in RSC Advances
- Vol. 6 (113) , 111797-111805
Abstract
In situ mass spectrometry measurements has been used to study as phase intermediates in CVD of TiO 2 thin films.Keywords
Funding Information
- Engineering and Physical Sciences Research Council (Core Capability for Chemistry Research – Universit)
- Engineering and Physical Sciences Research Council (EPSRC Centre for Doctoral Training in Molecular Mo)
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