Protection schemes for critical surface in vacuum environments
- 22 July 2005
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 23 (5) , 1319-1324
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Condensation‐Induced Particle Formation during Vacuum Pump DownJournal of the Electrochemical Society, 1993
- Reduction of particle contamination by controlled venting and pumping of vacuum loadlocksJournal of Vacuum Science & Technology A, 1990
- Vacuum particle generation and the nucleation phenomena during pumpdownJournal of Vacuum Science & Technology A, 1990
- Summary Abstract: Quantitative particulate contamination studies utilizing reduced turbulence pumping and ventingJournal of Vacuum Science & Technology A, 1984