Electron nanoprobe induced oxidation: a simulation of direct-write purification
- 1 June 2015
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Physical Chemistry Chemical Physics
- Vol. 17 (28) , 18294-18304
Abstract
A simulation provides insight into the electron beam driven purification of carbon contaminated nanoscale deposits using O2and H2O gas.Keywords
Funding Information
- European Cooperation in Science and Technology (CM1301)
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