High-speed noncontact profiler based on scanning white-light interferometry
Authors:
- Leslie DeckLDLeslie Deck
- Peter de GrootPGPeter de Groot
- 1 November 1994
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 33 (31) , 7334-7338
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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