Dually driven radio frequency plasma simulation with a three moment model
Authors:
- 1 July 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (4) , 2162-2172
Abstract
This article presents simulation results of a dually excited capacitive rf plasma reactor. A self-consistent three moment model is employed which is shown to accurately capture the ion flux and energy at the substrate. Self-dc biases at the powered electrodes are also self-consistently determined by relating surface charges through Gauss’ law. The simulation results of this rf triode system indicate that plasma density is predominantly determined by the primary electrode. Self-bias and ion bombardment energy at the secondary electrode both exhibit linear (logarithmic) dependency on the secondary rf power (frequency). This is qualitatively in good agreement with experimental results.Keywords
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