Fabrication and experiment studies of the piezoelectric micropump with saw-tooth microchannel

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Abstract
The micropumps with the novel saw-tooth microchannels and the traditional diffuser microchannels have been fabricated. The PDMS-glass-silicon-PDMS structure of the micropumps look like a sandwitch. The pump body based on the silicon wafer has been produced through the advanced microfabrication technique. The sealing between the silicon and the glass wafer by anodic bonding technology has been carried out, the irreversible sealing between the PDMS and glass, the silicon and PDMS by UV irradiation have been adopted. Finally, the maximum pressure head (MPH) and the maximum flow rate (MFR) of the two micropumps have been tested with different driving voltages and frequencies under sine, square and ramp signals. The results show that the MPH and MFR value increased along with the driving voltage under some frequency, and the effects of the sine wave driving are prior to other waves. The performance of the micropump with the novel saw-tooth microchannels has been enhanced greatly compared to the traditional diffuser micropump. Through experimental results measured the maximum value of MFR and MPH at two specific frequencies by driving micropump with 100 V p-p are 63.6 ¿l/min at 200 Hz and 1328.8 Pa at 200 Hz for the saw-tooth micropump under the sine signal driving, and 45.1 ¿l/min at 60 Hz and 681 Pa at 60 Hz for the traditional diffuser micropump under the square signal driving.

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