Supercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities?

This publication has 120 references indexed in Scilit:

• The effect of ultrasonic agitation on the stripping of photoresist using supercritical CO2 and co-solvent formulation
  Microelectronic Engineering, 2009
• Accessibility of cylindrical channels within patterned mesoporous silica films using nanoparticle diffusion
  Journal of Materials Chemistry, 2008
• Modulus–density scaling behaviour and framework architecture of nanoporous self-assembled silicas
  Nature Materials, 2007
• Measurement of Probe Diffusion in CO₂-Swollen Polystyrene Using in Situ Fluorescence Nonradiative Energy Transfer
  Macromolecules, 2003
• An overview of supercritical CO2 applications in microelectronics processing
  Microelectronic Engineering, 2003
• Self-Diffusion of Polystyrene in a CO₂-Swollen Polystyrene Matrix: A Real Time Study Using Neutron Reflectivity
  Macromolecules, 2002
• Aqueous-based photoresist drying using supercritical carbon dioxide to prevent pattern collapse
  Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2000
• Chemical Fluid Deposition: Reactive Deposition of Platinum Metal from Carbon Dioxide Solution
  Chemistry of Materials, 1999
• Polymer synthesis and characterization in liquid / supercritical carbon dioxide
  Current Opinion in Solid State and Materials Science, 1996
• Catalytic Properties of Ceria and CeO₂-Containing Materials
  Catalysis Reviews, 1996