Wavefront-coded phase measuring deflectometry for the all-focused measurement

Authors:
Publisher website
Google Scholar
Abstract
Phase measuring deflectometry is a powerful measuring method for complex optical surfaces, which captures the reflected fringe images encoded on the screen under the premise of focusing the measured specular surface. Due to the limited depth of field of the camera, the captured images and the measured surface cannot be focused at the same time. To solve the position-angle uncertainty issue, in this Letter, the wavefront coding technology is used to modulate the imaging wavefront of the deflectometry, thereby making the measuring system insensitive to the defocus and other low-order aberration including astigmatism, field curvature, and so on. To obtain the accurate phase, the captured fringe images are deconvoluted using the modulated point spread function to reduce the phase error. Demonstrated with a highly curved spherical surface, the measurement accuracy can be improved by four times. Experiments demonstrate that the proposed method can successfully reconstruct the complex surfaces defocusing the captured images, which can greatly release the focusing requirement and improve measurement accuracy. (C) 2022 Optica Publishing Group
Funding Information
  • International Partnership Program of Chinese Academy of Sciences (181231KYSB20200040)
  • Shanghai Sailing Program (20YF1454800, 22YF1454800)
  • Outstanding Member of Youth Innovation Promotion Association of the Chinese Academy of Sciences

This publication has 19 references indexed in Scilit: