Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force
- 29 April 2020
- journal article
- research article
- Published by Springer Nature in Nonlinear Dynamics
- Vol. 100 (3) , 1927-1940
Abstract
No abstract availableKeywords
Funding Information
- Directorate for Engineering (1608692)
This publication has 39 references indexed in Scilit:
- Modeling the nonlinear pull-in behavior of tunable nano-switchesInternational Journal of Engineering Science, 2016
- Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitationJournal of Micromechanics and Microengineering, 2015
- Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development levelDisplays, 2015
- Electrostatic pull-in instability in MEMS/NEMS: A reviewSensors and Actuators A: Physical, 2014
- A MEMS Low-Noise Sound Pressure Gradient Microphone With Capacitive SensingJournal of Microelectromechanical Systems, 2014
- A large-stroke electrostatic micro-actuatorJournal of Micromechanics and Microengineering, 2011
- A novel dynamic pull-in MEMS gyroscopeProcedia Engineering, 2011
- Dynamic pull-in phenomenon in MEMS resonatorsNonlinear Dynamics, 2006
- Behavioural analysis of the pull-in dynamic transitionJournal of Micromechanics and Microengineering, 2004
- Laterally driven electrostatic repulsive-force microactuators using asymmetric field distributionJournal of Microelectromechanical Systems, 2001