An approach for efficiently locating and electrically contacting nanostructures fabricated via UHV-STM lithography on Si(100)
Authors:
- 30 June 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 47 (1-4) , 235-237
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Ultrahigh vacuum–scanning tunneling microscopy nanofabrication and hydrogen/deuterium desorption from silicon surfaces: implications for complementary metal oxide semiconductor technologyApplied Surface Science, 1998
- Nanoscale patterning and oxidation of H-passivated Si(100)-2×1 surfaces with an ultrahigh vacuum scanning tunneling microscopeApplied Physics Letters, 1994