Absolute phase analysis method for three-dimensional surface profilometry using frequency-modulated grating
- 1 May 2003
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 42 (5) , 1249-1256
Abstract
The authors propose a new high-speed and accurate phase analysis and subsequent phase unwrapping method for grating projection surface profilometry. In the proposed method, a special grating pattern is used for the projection. The light intensity distribution of this grating pattern has a form of a frequency modulated sinusoidal wave. In this grating pattern, two different phase distributions are included. The frequency modulated grating, which can be generated with an LCD projector or a film projector easily, is projected onto an object. Then, nine frames with phase stepping at a regular interval for a cycle are taken by a CCD camera. From these nine pictures, the two wrapped phase distributions are analyzed simultaneously. Then, using these phase distributions, phase unwrapping is carried out at each pixel independently. The 3-D profile of the object can be reconstructed using the absolute phase distribution. Since this method is suitable for high-speed shape measurement, applications to various inspections and 3-D surface digitizing are expected. © 2003 Society of Photo-Optical Instrumentation Engineers.Keywords
This publication has 20 references indexed in Scilit:
- Digital fringe projection system for large-volume 360-deg shape measurementOptical Engineering, 2002
- Development of Accurate Shape Measurement System Using Multiple Reference Planes(Optical Method 2)Proceedings of the Asian Pacific Conference on Fracture and Strength and International Conference on Advanced Technology in Experimental Mechanics, 2001
- Overview of three-dimensional shape measurement using optical methodsOptical Engineering, 2000
- SHAPE MEASUREMENTS ON LARGE SURFACES BY FRINGE PROJECTIONExperimental Techniques, 1999
- Accelerated phase-measuring algorithm of least squares for phase-shifting interferometryOptical Engineering, 1997
- Design of algorithms for phase measurements by the use of phase steppingApplied Optics, 1996
- Phase-measuring interferometry: new methods and error analysisApplied Optics, 1994
- Automated phase-measuring profilometry of 3-D diffuse objectsApplied Optics, 1984
- Fourier transform profilometry for the automatic measurement of 3-D object shapesApplied Optics, 1983
- Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and LensesApplied Optics, 1974