Nitrogen plasma treatment of polyethylene and polystyrene in a remote plasma reactor

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Abstract
The effect of a remote nitrogen plasma on polyethylene and polystyrene was studied. The gas flow rate, the dilution of reactant gas, exposure times, and reactor base pressure were all found to have a large impact on the efficiency of nitrogen incorporation. Optimum conditions caused 18 atom % nitrogen to be incorporated within 20 seconds for polyethylene and 10 seconds for polystyrene. Studying a remote nitrogen plasma treated polyethylene sample over a period of 1 month indicated that except for a drop in the % N on initial exposure to air the concentration of nitrogen on the surface remained steady within the experimental limits. Angle resolved photoelectron spectroscopy indicated that nitrogen is incorporated to a depth below the analysis depth of XPS.

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