Microlenses Fabricated on Silicone Rubber Using F2 Laser
Authors:
- Hiromitsu TakaoHTHiromitsu Takao
- Hideyuki MiyagamiHMHideyuki Miyagami
- Masayuki OkoshiMOMasayuki Okoshi
- Narumi InoueNINarumi Inoue
- 1 April 2005
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 44 (4R)
Abstract
Microlenses are fabricated on silicone rubber surfaces employing phenomena in which silicone rubber swells and is modified to SiO2 by F2 laser irradiation at a laser fluence lower than the ablation threshold. In this method, silicone rubber is irradiated using a F2 laser beam through a mask which has circular apertures 10, 20, and 25 µm in diameter. Since silicone rubber swells by laser irradiation, it is necessary to separate the mask from the silicone rubber surface. The swelling is spherical and its surface becomes smooth when the distance between the mask and the silicone rubber surface is very small. The focal lengths of the microlenses are 10–170 µm, which are controlled by adjusting the number of irradiated pulses. Additionally, a 790 nm femtosecond laser beam is focused by the fabricated microlenses, and enables the microdrilling of fluorinated rubber.Keywords
This publication has 20 references indexed in Scilit:
- Fabrication of$hboxSiO_2$Microlenses on Silicone Rubber Using a Vacuum-Ultraviolet$hboxF_2$LaserIEEE Journal of Selected Topics in Quantum Electronics, 2004
- Ablation of Silicone Rubber Using UV-Nanosecond and IR-Femtosecond LasersJapanese Journal of Applied Physics, 2004
- SiO2Humps Formed on Silicone Rubber by F2Laser IrradiationJapanese Journal of Applied Physics, 2003
- Microlens Array Fabricated by Excimer Laser Micromachining with Gray-tone PhotolithographyJapanese Journal of Applied Physics, 2003
- Fabrication of SiO2-Humps on Silicone Rubber Using F2 LaserJapanese Journal of Applied Physics, 2002
- Wideband polymer thermo-optic wavelengthtunable filter with fast response for WDM systemsElectronics Letters, 2000
- Polymeric optical waveguide circuits formed using silicone resinJournal of Lightwave Technology, 1998
- Optical interconnects based on arrays of surface-emitting lasers and lensletsApplied Optics, 1992
- Multiple imaging and multiple Fourier transformation using planar microlens arraysApplied Optics, 1990
- Ion‐Beam Etching of InP and Its Application to the Fabrication of High Radiance InGaAsP / InP Light Emitting DiodesJournal of the Electrochemical Society, 1984