Physical limitations on miniaturization in microelectronics

Authors:
  • YGYurii V Gulyaev
    Yurii V Gulyaev
  • VSV B Sandomirskiĭ
    V B Sandomirskiĭ
  • ASA A Sukhanov
    A A Sukhanov
  • YTYu Ya Tkach
    Yu Ya Tkach
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Abstract
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