Micro gratings written in ZnO:Al thin films using picosecond UV‐laser interference patterning

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Abstract
Diffraction micro gratings have been written in ZnO:Al thin films using a picosecond laser operating at 355 nm. Micro gratings of 20 µm diameter with a period of 860 nm show a groove depth up to 120 nm. The total transmittance of square‐centimeter‐size grating‐textured ZnO:Al films was almost unchanged after grating formation, while the sheet resistance increased moderately. The textured films reached haze values of 9% at 700 nm. This simple texturing method can be applied also to ZnO:Al films that cannot be texture etched. magnified image Illustration of the interfering laser beams and the resulting micro grating (left) and reflection from a micro grating array written in ZnO:Al on glass (right).
Funding Information
  • Bundesministerium für Forschung, Technologie und Raumfahrt (00325299)

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