Fabrication and characterization of PZT thin-film vibrators for micromotors
Authors:
- P. MuraltPMP. Muralt
- M. KohliMKM. Kohli
- T. MaederTMT. Maeder
- A. KholkinA. Kholkin
- K. BrooksKBK. Brooks
- N. SetterNSN. Setter
- R. LuthierRLR. Luthier
- 1 May 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 48 (2) , 157-165
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Hybrid ultrasonic elastic force motors micromachined in siliconIntegrated Ferroelectrics, 1995
- Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substratesJournal of Materials Research, 1994
- Use of Transmission Electron Microscopy for the Characterization of Rapid Thermally Annealed, Solution‐Gel, Lead Zirconate Titanate FilmsJournal of the American Ceramic Society, 1994
- Piezoelectric properties of sol-gel-derived ferroelectric and antiferroelectric thin layersJournal of Applied Physics, 1994
- In-Situ Thin Film Growth of PbTiO3 By Multi Target SputteringMRS Proceedings, 1994
- Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integrationJournal of Applied Physics, 1994
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992
- Ultrasonic Motor Utilizing Elastic Fin RotorJapanese Journal of Applied Physics, 1991
- Piezoelectric Thin Film Ultrasonic MicromotorsMRS Proceedings, 1991