Effect of Mechanical Strain on Electrical Performance of Flexible P-Type SnO Thin-Film Transistors
- 28 October 2019
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 66 (12) , 5183-5186
Abstract
This article investigates the effect of mechanical bending strain on the electrical performance and gate-bias stability of flexible p-type tin monoxide (SnO) thin-film transistors (TFTs). The on-polyimide SnO TFTs have an inverted-staggered structure with a back channel passivated by SiN x and HfO 2 layers. The as-fabricated linear field-effect mobility, threshold voltage, subthreshold swing, and ON/OFF current ratio are 0.41 cm 2 V-1s -1 , 0.74 V, 1.9 V/dec, and 1.1 × 10 4 , respectively. The field-effect mobility decreases as the applied tensile strain increases, while it stays almost unaltered when a compressive strain is applied. A prominent increase of the positive-gate-biasstress-induced threshold voltage shift is observed when the TFT is outwardly bent. The result shows that the mechanical tensile strain has a more significant impact on the electrical performance of p-type SnO TFTs.Keywords
Funding Information
- Ministry of Science and Technology, Taiwan (MOST 105-2221-E-002-160-MY3, MOST 105-2221-E-002-179-MY3, MOST 108-2221-E-002-167-MY3)
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