Analysis of Two-Dimensional Etching Effect on the Profiles of Fine Holographic Grating Made of Positive Photoresist AZ2400
Authors:
- Kashiko KodateKKKashiko Kodate
- Takeshi KamiyaTKTakeshi Kamiya
- Haruko TakenakaHTHaruko Takenaka
- Hisayoshi YanaiHYHisayoshi Yanai
- 1 January 1978
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 17 (S1)