Design and realization of cap-shaped cilia MEMS vector hydrophone
Authors:
- Shan ZhuSZShan Zhu
- Guojun ZhangGZGuojun Zhang
- Zhenzhen ShangZSZhenzhen Shang
- Xi YangXYXi Yang
- Ting LvTLTing Lv
- Xiaoqi LiangXLXiaoqi Liang
- Xiaoyong ZhangXZXiaoyong Zhang
- Peng ChenPCPeng Chen
- Wendong ZhangWZWendong Zhang
- 1 October 2021
- journal article
- research article
- Published by Elsevier in Measurement
- Vol. 183
Abstract
No abstract availableKeywords
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