Vertically Coupled Suspended Silicon Nitride Microdisk-Based Optical Sensor

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Abstract
A vertically coupled suspended silicon nitride resonator sensor is experimentally demonstrated, which consists of a bottom-layer un-suspended access waveguide and a top-layer suspended microdisk cavity. The presented sensor can realize a high device sensitivity with a good mechanical stability. For a 40-μm-radius disk, more than 10 4 quality factor at a wavelength of 1548.98 nm can be obtained with a moderate free-spectral range of 5.66 nm. The device sensitivity is measured by covering different organic liquids, and the sensitivity is about 554 nm/RIU. The fabrication of the proposed 3-D sensor is compatible with the conventional photolithography process, which would benefit its optical sensing applications.
Funding Information
  • National Natural Science Foundation of China (61705130, 11774235, 11561121003)
  • Natural Science Foundation of Shanghai Municipality (17ZR1443400)
  • Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning
  • Open Fund of the State Key Laboratory of ASIC and System

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